Dr. Howe's research focus is in the design and fabrication of sensors and actuators using micro and nanotechnologies, with applications to information processing and energy conversion. His research interests include micro electromechanical system (MEMS) design, micro/nanomachining processes, and self-assembly processes.  A major focus of his research from the early 1980s until recently was technologies for integrated microsystems, which incorporate both silicon integrated circuits and micromechanical structrures. Recently, his research has shifted to nano electromechanical systems (NEMS), for applications ranging from chemical sensors to relays and logic devices. P